Brand:SHIBAURA
Model:TOKUDA
Type:Dual Oil-Sealed Rotary Vacuum Pump
Power Source:Electric
Vacuum Level:Up to 0.01 Pa
Flow Rate:20 m³/h
Oil Capacity:1.2 L
Noise Level:≤55 dB(A)
Motor Power:1.1 kW
Dimensions:450 × 310 × 310 mm
Weight:55 kg
This SHIBAURA DUAL OIL-SEALED ROTARY VACUUM PUMP ASSE TOKUDA is engineered for high-performance operations in demanding industrial environments. The pump’s robust dual oil-sealed design minimizes wear and tear, ensuring long-lasting durability and minimal maintenance. Its compact yet powerful motor delivers a flow rate of up to 20 m³/h at an ultra-low noise level of ≤55 dB(A), making it ideal for noise-sensitive areas. The unit is equipped with a large oil capacity of 1.2 liters, providing extended operational cycles between servicing. The pump’s oil-sealed system effectively reduces gas leakage, ensuring high efficiency and vacuum levels up to 0.01 Pa. Its ergonomic design includes easy-to-access maintenance points, simplifying routine checks and repairs. Ideal for use in semiconductor manufacturing, chemical processing, and other industrial applications requiring precise vacuum control.















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