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MKS Instruments 93-6127 796-801289-001VLV.2 High Vacuum Right Angle Stage Module

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The MKS Instruments 93-6127 796-801289-001VLV.2 High Vacuum Right Angle Stage Module is designed for precise positioning in vacuum environments, offering high accuracy and reliability in semiconductor manufacturing and other cleanroom applications.

Material:Stainless Steel

Vacuum Compatibility:Up to 1E-9 Torr

Operating Temperature Range:-40°C to 200°C

Stage Motion Precision:±0.005mm

Electrical Connection:M12 Connector

Power Consumption:20W

Dimension (LxWxH):150mm x 100mm x 50mm

Weight:1kg

    Engineered for optimal performance in demanding vacuum conditions, the MKS Instruments 93-6127 796-801289-001VLV.2 High Vacuum Right Angle Stage Module is a critical component for advanced semiconductor processing and research applications.

    Featuring a robust stainless steel construction, this module ensures durability and resistance to corrosion, ensuring longevity in harsh environments.

    With its right-angle design, it optimizes space utilization and simplifies integration into complex setups, enhancing efficiency in cleanroom environments.

    The module’s absence of a housing allows for unobstructed access and easy maintenance, crucial for maintaining operational uptime in high-reliability applications.

    Offering an impressive positioning accuracy of ±0.01mm, it delivers unparalleled precision necessary for achieving the highest quality standards in semiconductor manufacturing and research.

    Adaptable to a wide range of operating temperatures (-40°C to +120°C), this module can withstand extreme conditions, making it suitable for various industrial and laboratory settings.

MKS 93-6127 796-801289-001VLV.2 STAGE HIGH VAC RIGHT ANGLE W/O HOUSING




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